近年来传感技术迅速发展,传感器新原理、新材料和新技术的研究更加深入、广泛,传感器新品种、新结构、新应用不断涌现、层出不穷,现在新型传感器研发的重点领域主要有以下几个方面。一、基于MEMS技术的新型传感器微传感器(尺寸从几微米到几毫米的传感器)特别是以MEMS(微电子机械系统)技术为基础的传感器已逐步实用化,这是今后发展的重点之一。微机械设 In recent years, the rapid development of sensor technology, sensor new principles, new materials and new technologies more in-depth, extensive, new varieties of sensors, new structures, new applications continue to emerge, an endless stream of new sensors now focus on the following areas aspect. First, the new sensor based on MEMS technology Micro sensor (size from a few microns to a few millimeters of sensors) Especially MEMS (Micro Electro Mechanical Systems) technology-based sensors have been gradually practical, which is the focus of the future development. Micro-mechanical design