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烷烃类气体中的碳原子是碱金属激光器中碳粒沉积的唯一来源,因此对碱金属蒸气室内的烷烃气体气压进行高精度无干扰探测有助于定量分析碳粒沉积问题。采用傅里叶变换红外光谱技术,选择主峰右翼的吸收峰(3.369μm)作为特征峰,对甲烷气压进行了定量分析,并分析了蒸气室倾斜对测量精度的影响。实验结果表明,对纯甲烷以及甲烷和氦气配比1…3时的气体,该方法对甲烷气压的测量最大偏差分别为0.055kPa和0.057kPa;当蒸气室倾斜角度大于0.0035rad时,测量偏差将高于0.075%。该定量分析甲烷气压方法的测量精度满足碱金属激光器碳粒沉积问题表征的需求,将为碱金属激光器碳粒沉积机理研究提供参考。
Carbon atoms in alkane gases are the sole source of carbon deposits in alkali metal lasers, so high-precision, non-interference detection of alkane gas pressures in the alkali vapor chamber helps to quantify carbon deposition problems. The Fourier transform infrared spectroscopy was used to select the right peak of the main peak (3.369μm) as the characteristic peak. The methane pressure was quantitatively analyzed and the influence of the tilt of the vapor chamber on the measurement accuracy was analyzed. The experimental results show that the maximum deviation of methane gas pressure measured by the proposed method is 0.055 kPa and 0.057 kPa for the gas with pure methane and methane and helium ratio 1: 3, respectively. When the tilt angle of the steam chamber is greater than 0.0035 rad, the measurement deviation Will be higher than 0.075%. The quantitative analysis of methane gas pressure measurement accuracy to meet the needs of the characterization of alkali metal laser deposition of carbon will provide a reference for the alkali metal laser deposition mechanism of carbon.