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详细分析了洁净介质中颗粒状杂质检测的光学计数原理,并根据光散射理论推导出了消光式颗粒计数器中的光能与粒径之间的对应关系。通过数值计算,说明了消光原理在具体应用中存在的不足,分析了在对大颗粒测量时用光阻原理代替消光原理的可行性。设计了一套计数装置,增加了用于小颗粒检测的前向散射光探测器和光源波动监测器。实验结果表明,该套计数装置能够对0 .5μm以上的颗粒进行检测,可以表征被测对象的洁净度。
The principle of optical counting for the detection of granular impurities in clean media is analyzed in detail. According to the light scattering theory, the correspondence between light energy and particle size in the extinction particle counter is deduced. Through the numerical calculation, the insufficiency of the extinction principle in the concrete application is explained. The feasibility of replacing the extinction principle with the photoresist principle in the measurement of large particles is analyzed. A counting device was designed to add a forward-scattered light detector and a light source monitor for small particles. The experimental results show that the set of counting device can detect the particles above 0.5μm and can characterize the cleanliness of the tested object.