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介绍粉末溅射 Sn O2 / Ce O2 酒敏薄膜特性的研究和气敏元件气敏层参数的设计 .介绍元件热功耗的规律 ,反应温度的规律 ,测试电压对灵敏度的影响的规律 .讨论了用相对灵敏度消除湿度影响的设想 ,以及对低功耗元件 ,简单气敏元件集成电路研制等问题
This paper introduces the characteristics of SnO2 / CeO2 thin film and the design of the gas-sensing layer parameters of the gas sensor.The rules of thermal power consumption, the law of the reaction temperature and the influence of the test voltage on the sensitivity are introduced.The effects of The relative sensitivity to eliminate the impact of humidity ideas, as well as low-power components, simple gas sensor integrated circuit development and other issues