为解决ZnO温度传感器测温精度和集成化的问题,设计了一套测量光谱范围为350~450 nm,分辨率为0.1 nm的光谱监测系统。通过合理地选择光学系统的结构、计算各光学元件的参数和光路结构以及消除系统像差,实现了光谱监测系统的窄波段、高分辨率的要求。最终结果显示系统的体积为111 mm×83 mm×30 mm,基本满足系统可集成化的要求,可以做进一步的优化,公差分析使之满足加工需求。 In order to solve the problem of temperature measurement and integration of ZnO temperature sensor, a spectral monitoring system with a spectral range of 350-450 nm and a resolution of 0.1 nm was designed. By reasonably choosing the structure of the optical system, calculating the parameters of each optical element and the optical path structure and eliminating the systematic aberrations, the requirements of the narrowband and high resolution of the spectrum monitoring system are achieved. The final result shows that the volume of the system is 111 mm × 83 mm × 30 mm, which basically meets the requirements of system integration and can be further optimized. Tolerance analysis can meet the processing needs.