论文部分内容阅读
微操作器是微操作机器人的核心部件,本文介绍了作者研制的压电陶瓷管驱动三自由度集成式微操作器,在此基础上,研制了微位移控制系统,包括双极性压电陶瓷驱动电流、微位移检测系统和微位移控制器,采用仿人智能PI控制方法,对微操作器进行了动静态测试,得到微操作器的性能指标。通过高精度位置闭环控制,补偿了压电陶瓷本身所具有的迟滞、蠕变、非线性等不足,提高了控制精度,达到了较好的控制效果。实验表明,该控制系统能够保证微操作器实现纳米级微动定位,满足微操作的要求。
Micro-manipulator is the core component of micromanipulator. This paper introduces the piezoelectric micro-manipulator with three degrees of freedom driven by the author. On this basis, micro-displacement control system is developed, including bipolar piezoelectric ceramic driver Current, micro-displacement detection system and micro-displacement controller, using artificial intelligence PI control method, the micro-manipulator was subjected to dynamic and static tests to get the performance of micro-manipulator. The closed-loop control of high-precision position compensates the shortcomings of hysteresis, creep and nonlinearity of piezoceramic itself, improves the control precision and achieves better control effect. Experiments show that the control system can ensure that the micro-manipulator can achieve micro-positioning at nanometer level and meet the requirements of micro-operation.