Self-adaptive phosphor coating technology for wafer-level scale chip packaging

来源 :Journal of Semiconductors | 被引量 : 0次 | 上传用户:liuleizishen
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A new self-adaptive phosphor coating technology has been successfully developed,which adopted a slurry method combined with a self-exposure process.A phosphor suspension in the water-soluble photoresist was applied and exposed to LED blue light itself and developed to form a conformal phosphor coating with self-adaptability to the angular distribution of intensity of blue light and better-performing spatial color uniformity.The self-adaptive phosphor coating technology had been successfully adopted in the wafer surface to realize a waferlevel scale phosphor conformal coating.The first-stage experiments show satisfying results and give an adequate demonstration of the flexibility of self-adaptive coating technology on application of WLSCP. A new self-adaptive phosphor coating technology has been developed, which adopted a slurry method combined with a self-exposure process. A phosphor suspension in the water-soluble photoresist was applied and exposed to LED blue light itself and developed to form a conformal phosphor coating with self-adaptability to the angular distribution of intensity of blue light and better-performing spatial color uniformity. The self-adaptive phosphor coating technology had been successfully adopted in the wafer surface to realize a wafer level scale phosphor conformal coating.The first- stage experiments show satisfying results and give an adequate demonstration of the flexibility of self-adaptive coating technology on application of WLSCP.
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