我厂利用国产M8S61-F超精加工机床对一些內孔进行超精加工时,由于被加工零件、夹具、机床主轴与磨头等存在误差,而磨头磨石夹架的结构又不能对这些误差进行补偿,因而造成磨石往复运动时的轨迹与零件被加工表面不是一个面接触,加工过程中出现了较大的整形误差。原来的磨石夹架结构如图2。当磨石与零件被加工表面在垂直平 I plant using domestic M8S61-F superfinishing machine for some of the holes for superfinishing, due to being machined parts, fixtures, machine tool spindle and grinding head there is an error, and the structure of grinding head grindstone frame can not be these errors To make compensation, thus resulting in the reciprocating movement of the grindstone and the workpiece surface is not a surface contact, the processing of a larger plastic deformation error. The original millstone holder structure shown in Figure 2. When the grinding stone and parts machined surface in the vertical plane