六硼化镧(LaB_6)是一种具有特殊结构的晶体,由于其所固有的优点而非常适用作大型精密可拆卸真空仪器的电子源。从本世纪70年代末起,美、日等国研制成实用的 LaB_6 阴极,并广泛应用于大型精密电子分析仪器(如透射电镜、反射式扫描电镜、俄歇电子能谱仪、电子探针等),电子束曝光机、电子束加工设备以及高能加速器、等离子体的产生等。自改革开放以来,我国从国外引进了数以千计的大型精密分析仪器,其中只有很少部分配有 LaB 6 is a crystal with a special structure, which is very suitable as an electron source for large-scale precision detachable vacuum instruments due to its inherent advantages. Since the late 1970s, the United States, Japan and other countries have developed practical LaB_6 cathodes and are widely used in large-scale precision electronic analytical instruments (such as transmission electron microscope, reflection scanning electron microscope, Auger electron spectrometer, electron probe, etc. ), Electron beam lithography, electron beam machining equipment, and high-energy accelerators, plasma generation and the like. Since the reform and opening up, China has imported thousands of large-scale precision analytical instruments from abroad, of which only a few are equipped