论文部分内容阅读
提出了一种基于激光的Raman -Nath衍射和光干涉进行纳米级测量的光机电一体化的新方法 ,分析了数字鉴相、A/D变换和X/Y驱动的特点 ,并对测量精度进行了扼要地分析
A new opto-mechatronics method based on Raman-Nath diffraction and optical interference of laser is proposed, and the characteristics of digital phase discrimination, A / D conversion and X / Y driving are analyzed. And the measurement accuracy is analyzed Briefly analyzed