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采用简单的有机-无机混合的溶胶-凝胶方法制备了折射率在一定范围内可调的波导材料,并利用其制备了平面波导环形谐振腔器件。波导结构呈现倒脊形,其制备工艺首先是利用感应耦合等离子体刻蚀技术(ICP)在二氧化硅衬底上刻蚀波导结构的凹槽,然后再沉积波导薄膜。利用光谱仪对器件的传输特性进行了测量,观测到具有10 dB对比度,自由光谱范围0.182 nm周期性谐振现象,结合环形谐振腔的传输特性,得到环形腔具有较低的传输损耗1.7 dB/cm。同时对环形谐振腔的温度特性进行了测量,得出波导材料的热光系数为-1.54×10-4/℃。
A waveguide material with refractive index adjustable within a certain range was prepared by a simple organic-inorganic hybrid sol-gel method. The planar waveguide ring resonator was fabricated by the sol-gel method. The structure of the wave guide structure is inverted ridge. The preparation process of the wave guide structure is firstly to etch the groove of the wave guide structure on the silicon dioxide substrate by inductively coupled plasma etching (ICP) and then deposit the wave guide film. The transmission characteristic of the device was measured by using a spectrometer. The periodic resonance phenomenon with 10 dB contrast and free spectral range of 0.182 nm was observed. Combined with the transmission characteristics of the ring resonator, the ring cavity was found to have low transmission loss of 1.7 dB / cm. At the same time, the temperature characteristics of the ring resonator were measured, and the thermal coefficient of the waveguide material was -1.54 × 10-4 / ℃.