与传统基于石英晶体微天平的压电传感器相比,横向场激励模式压电传感器具有更优异的性能。该文基于微声波理论,分析了横向场激励模式压电体声波器件的声传播机理,计算了石英晶体在任意切型及横向电场方向上的压电耦合系数,并根据计算结果设计了新型的传感器结构。3种不同浓度的水溶液用于测试传感器对液体粘度、介电常数和电导率等变化的响应。结果表明,横向场激励压电传感器不仅具有较好的质量敏感效应,还对被测液体电特性参数变化具有较高的灵敏度,可用于研制复合型压电生物传感器。 Compared with the traditional piezoelectric sensor based on quartz crystal microbalance, the transverse field excitation mode piezoelectric sensor has more excellent performance. Based on the theory of the micro-sound wave, the acoustic propagation mechanism of the transverse field excited mode piezoelectric acoustic wave device is analyzed. The piezoelectric coupling coefficient of the quartz crystal in arbitrary cut and transverse electric field direction is calculated. Based on the calculated results, a new type of Sensor structure. Three different concentrations of aqueous solutions are used to test the sensor’s response to changes in liquid viscosity, dielectric constant, and conductivity. The results show that the lateral field excited piezoelectric sensor not only has better mass-sensitive effect, but also has higher sensitivity to the change of electrical properties of the measured liquid and can be used to develop a composite piezoelectric biosensor.