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动态流导法真空校准装置是真空计量的标准,可用于高真空和超高真空规的校准,真空度的校准范围为10-1～5×10-7Pa,合成标准不确定度为0.69%～1.4%。
Dynamic flow guidance method vacuum calibration device is the standard of vacuum measurement, which can be used for the calibration of high vacuum and ultra-high vacuum gauge. The calibration range of vacuum degree is 10-1 ~ 5 × 10-7Pa and the synthetic standard uncertainty is 0.69% 1.4%.