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在惰性气氛下,采用约束弧等离子体技术制备了不同形貌的铝纳米晶,研究了工艺参数对纳米晶形貌的影响,并利用X射线衍射(XRD)、透射电子显微镜(TEM)和相应选区电子衍射(SAED)、X射线能量色散分析谱仪(XEDS)对样品的形貌、晶体结构、成分进行表征。同时对纳米晶的形成机理进行了探讨。实验结果表明,气体压力、气体流量和反应时间是影响纳米晶形貌的主要因素,通过控制工艺参数,可以得到不同性能的铝纳米晶,从而实现铝纳米晶的可控制备。
The effects of technological parameters on the morphology of nanocrystals were studied. The effects of technological parameters on the morphology of nanocrystals were investigated by X-ray diffraction (XRD), transmission electron microscopy (TEM) and their corresponding Selected area electron diffraction (SAED), X-ray energy dispersive spectroscopy (XEDS) to characterize the morphology, crystal structure, composition of the sample. At the same time, the formation mechanism of nanocrystals was discussed. The experimental results show that gas pressure, gas flow rate and reaction time are the main factors that affect the morphology of nanocrystals. By controlling the process parameters, different properties of nanocrystalline nanocrystals can be obtained, so that the controllable preparation of aluminum nanocrystals can be achieved.