基于单壁碳纳米管(SWCNT)的场效应气体传感器由于具有传感性能好、体积小、室温操作和加偏压自我解吸附等优良性能,有着广泛的应用前景。利用单壁碳纳米管自组装技术在SiO2/Si基底上制备均匀分布的SWCNT薄膜,将其作为沟道制作了具有灵敏开关特性的场效应晶体管(FET),该FET器件的开关比达到105。将此FET器件作为气体传感芯片用于甲基膦酸二甲酯(DMMP)气体分子的检测。结果显示,当通入DMMP气体时,器件的阈值电压向负栅电压方向移动。当DMMP体积分数为5×10-6,栅压为-10 V时,器件的灵敏度达到32%,响应时间为300 s。在15 V的栅压下器件能够很快地实现气体解吸附。 Field effect gas sensors based on single-walled carbon nanotubes (SWCNTs) have wide application prospects because of their excellent sensing performance, small volume, operation at room temperature and self-desorption by biasing. A SWCNT thin film with uniform distribution was fabricated on SiO2 / Si substrate by single-walled carbon nanotube self-assembly technique. The field effect transistor (FET) with a sensitive switching characteristic was fabricated. The switching ratio of this FET reached 105. This FET device is used as a gas sensing chip for the detection of methyl methylphosphonate (DMMP) gas molecules. The results show that when the DMMP gas is passed, the threshold voltage of the device is shifted toward the negative gate voltage. When the DMMP volume fraction of 5 × 10-6, gate voltage of -10 V, the device sensitivity of 32%, the response time of 300 s. At a gate voltage of 15 V, the device desorbs gas quickly.