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KBA显微镜是一种非轴对称、非共轴的掠入射成像系统。其结构复杂,调节精度要求很高,在实际成像实验操作中难以掌握其成像特性。利用光学设计软件模拟其成像,对系统的调节和成像分析提供有益的参考。利用光学设计软件ZEMAX模拟了KBA显微镜对点源的成像过程,给出了KBA显微镜成像系统的焦深约为1 mm,景深为50 mm左右。并且由模拟可知,掠入射角对成像的影响很大。对像素尺寸约10μm的探测设备,模拟得出KBA成像系统的空间分辨力上限为3μm左右。基于星光Ⅱ装置对周期为20μm的网格靶成像,获得了KBA显微镜较为清晰的X光图像。该项工作为进一步开展掠入射成像系统的研究奠定了基础。
KBA microscope is a non-axisymmetric, non-coaxial grazing incidence imaging system. Due to its complex structure and high regulation accuracy, it is difficult to grasp its imaging characteristics in actual imaging experiment. The use of optical design software to simulate its imaging, the system regulation and imaging analysis provide a useful reference. The optical imaging software ZEMAX was used to simulate point source imaging with KBA. The depth of focus of the KBA was about 1 mm and the depth of field was about 50 mm. And by simulation we can see that grazing angle of incidence has a great impact on imaging. For a detection device with a pixel size of about 10 μm, the upper limit of the spatial resolution of the KBA imaging system is found to be about 3 μm. The X-ray images of KBA microscope were obtained based on the Star Ⅱ device imaging the grid with a period of 20μm. This work laid the foundation for the further research of grazing incidence imaging system.