针对一种下极板独立的700V高压集成电容,进行了瞬态可靠性研究。研究表明,随着电容下极板尺寸的增加,电容的瞬态可靠性下降。用器件仿真软件MEDICI计算得出,在瞬态电压上升沿为200ns的情况下,电容下极板最大可靠宽度为124μm;同时,还得出一系列上升沿时间小于200ns的电容结构下极板最大可靠宽度。 A 700V high voltage integrated capacitor with a lower polar plate was tested for transient reliability. Studies have shown that as the size of the plate under the capacitor increases, the transient reliability of the capacitor decreases. Using the device simulation software MEDICI, the maximum reliable width of the plate under the capacitor is 124μm at the rising edge of transient voltage is 200ns. At the same time, a series of plates under the capacitor structure whose rising time is less than 200ns is the largest Reliable width.