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各种光源在半导体工艺的发展中一直起着重要的作用。如光刻、检验等许多关键工艺都需要一定的特定光源。与常规光源相比,激光具有相干性好、方向性强、亮度高等特点,因而在许多半导体工艺过程中得到广泛应用。许多新型的激光加工工艺为半导体技术的发展开辟了广阔的前景。激光用于半导体工业已经超过十年,早期的应用包括如激光划片、在陶瓷基片上打孔、双频激光精密定位、厚、薄膜电阻的激光微调等。其中激光微调仍是目前应用得最为普遍与成功的一种。
Various light sources have always played an important role in the development of semiconductor technology. Many key processes such as photolithography and inspection require a specific light source. Compared with the conventional light source, the laser has the characteristics of good coherence, strong directivity and high brightness, and is therefore widely used in many semiconductor processes. Many new laser processing technologies have opened up broad prospects for the development of semiconductor technology. Lasers have been used in the semiconductor industry for more than a decade. Earlier applications include laser scribing, drilling on ceramic substrates, precision dual-frequency laser positioning, laser trimming of thick, thin-film resistors, and more. Laser trimming is still one of the most common and successful applications.