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本文用椭圆术对1Cr18Ni9Ti 钢的钝化膜的生长性质进行了研究,并对这种极薄钝化膜(吸收膜)的椭圆仪参数(Δ,Ψ)的一些特性进行了计算分析。分析结果表明,该钝化膜厚度约50,生长过程满足对数规律。结果还表明,钝化膜生长过程中伴随着结构的变化,该钝化膜可以看成是光学性质逐渐变化的复层膜。本文的研究说明,在不锈钢极薄钝化膜的厚度、生长规律及生长过程中结构变化的研究方面,椭圆仪是一种非常有用的分析手段。
In this paper, the growth properties of the passivation film of 1Cr18Ni9Ti steel were studied by ellipse, and some characteristics of ellipsometer parameters (Δ, Ψ) of the ultrathin passivation film (absorption film) were calculated and analyzed. The analysis results show that the passivation film thickness of about 50, the growth process to meet the logarithmic law. The results also show that the passivation film is accompanied by changes in the structure of the growth process, the passivation film can be seen as a gradual change in optical properties of the multilayer film. The research in this paper shows that ellipsometry is a very useful analytical tool in the research of the thickness and growth rules of stainless steel ultrathin passivation films and the structural changes during growth.