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较为系统地介绍了一台激光分子束外延的总体结构和关键技术研究 .同时使用该设备和技术 ,实现精确控制原子尺度外延生长 ,获得原子尺度光滑表面的氧化物外延薄膜等实验结果 .
The overall structure and key technologies of a laser molecular beam epitaxy are systematically introduced.At the same time, the experimental results of the precise control of atomic scale epitaxial growth and the oxide epitaxial thin film with the atom-scale smooth surface are obtained.