在同时考虑到氧外扩散和沉淀作用的情况下,研究退火后间隙氧分布和洁净区宽度随退火时问的变化。根据同质成核理论,推导最大成核速度对应温度与初始间隙氧热平衡温度之间的关系。提出根据洁净区宽度、外扩散效率和初始氧含量选择外扩散温度、时间及成核退火温度的方法。具体实验鳍果表明理论分析和选择方法是正确的。 In the meantime, considering the effect of oxygen diffusion and precipitation, the distribution of oxygen in the gap after annealing and the change of the width of the clean zone with the annealing time were studied. According to the theory of homogeneous nucleation, the relationship between the maximum nucleation rate and the initial interstitial oxygen-heat equilibrium temperature is deduced. According to the width of clean zone, the diffusion efficiency and the initial oxygen content, the method of choosing the diffusion temperature, time and nucleation annealing temperature is proposed. The experimental results show that the theoretical analysis and selection method is correct.