引言自1970年美国贝尔实验室提出固态成像器件概念后,固体图像传感器便得到了迅速发展,而成为传感技术中的一个重要分支。CMOS图像传感器与CCD图像传感器的研究几乎是同时起步,但由于受当时工艺水平的限制,CMOS图像传感器图像质量差、分辨率低、噪声降不下来和光照灵敏度不够,因而没有得到重视和发展。而CCD器件因为有光照灵敏度高、噪 Introduction Since the introduction of the solid-state imaging device concept by Bell Labs in 1970, the solid-state image sensor has rapidly developed and become an important branch in sensing technology. CMOS image sensor and CCD image sensor almost start at the same time. However, due to the limitation of current technology level, the CMOS image sensor has poor image quality, low resolution, no noise reduction and insufficient illumination sensitivity, so it has not been paid attention to and developed. The CCD device because of the high sensitivity of light, noise