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市场上主流的MEMS流量传感器在其量程的小段范围内综合精度最高可达到0.5%F.S,大范围的测量误差2.5%F.S左右,甚至9%F.S以上。如果直接采用该传感器对流量进行控制,不仅造成较大的测试误差,而且占据较大的空间。文章采用某型号流量传感器作为测量元件,利用传感器最高精度的测试范围,实现了小量程传感器对大流量的高精确控制。对MEMS流量控制器的方案进行了详细介绍,以10 scm/min为例,对其进行了设计计算。结果表明,该方法满足设计要求,达到了设计目的,为气体流量的精确控制提供了一条简单可行的途径。
The mainstream MEMS flow sensor on the market in the range of its small range of comprehensive accuracy up to 0.5% F.S, a wide range of measurement error of 2.5% F.S or so, and even above 9% F.S. If the sensor is used directly to control the flow rate, it will not only cause a large test error, but also occupy more space. The article uses a certain type of flow sensor as a measuring element, and utilizes the testing range of the sensor with the highest precision to realize a high-precision control of a large flow rate by a small range sensor. The scheme of MEMS flow controller is introduced in detail. Taking 10 scm / min as an example, the design and calculation are carried out. The results show that the method meets the design requirements and achieves the design purpose, providing a simple and feasible way for precise control of gas flow.