论文部分内容阅读
为了改进微机电系统中的传感器应用范围和特性参数，采用微纳光纤制作了环形谐振腔结构，设计的结构具有尺寸小、损耗低，品质因素高等优点。理论上分析了微纳光纤的光传输模式特性，通过电场的传数矩阵推导了谐振腔中的速度变化与光强变化间的关系，得到了加速度作用下微环谐振腔的谐振波长、周长、有效折射率的变化值间的函数关系。仿真结果分析表明：设计的微环波导电场波动明显，耦合效率较好；光谱强度和3 dB带宽变化较小，Q值达到104；在质量块每增加10 g时，输出光谱图约向右漂移3 nm；加速度与谐振波长漂移量基本呈线性关系，可以通过谐振波长的漂移量来实现对加速度的测量。研究结果能够为全光网络和微机电系统提供实现多种功能的光波导器件。“,”In order to improve mems-sensor application and the characteristic of parameters, the micro-nano optical fiber ring resonator structure was designed, which was a small size, low dissipation, and high quality factor. The characteristics of micro-nano optical fiber and optical transmission mode were analyzed theoretically, through the electric field of transfer matrix, the function relationships among wavelength, perimeter, effective refractive index for micro ring resonator were obtained under the acceleration effect. The results of simulation analysis show that electric field of waveguide fluctuates significantly, and coupling efficiency of waveguide is better. Spectral intensity and 3 dB bandwidth change smaller. Q value reaches 104. When mass increases 10 g, output spectrum drifts to the right about 3 nm. Acceleration and drift quantity of resonant wavelength are almost linear. Drift of resonant wavelength can be used to measure acceleration. The results can provide variety of optical waveguide devices for all-optical networks and micro-electromechanical system.