Thickness shear mode quartz crystal resonators with optimized elliptical electrodes

来源 :Chinese Physics B | 被引量 : 0次 | 上传用户:zengquaner
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Quartz crystal resonators (QCRs) with circular electrodes have been widely used for various liquid and gas sensing applications. In this work,quartz crystal resonators with elliptical electrodes were studied and tested for liquid property measurement. Mindlin’s theory was used to optimize the dimension and geometry of the electrodes and a 5-MHz QCR with minimum series resistance and without any spurious modes was obtained. A series of AT-cut QCRs with elliptical electrodes of different sizes were fabricated and their sensing performances were compared to devices with circular electrodes. The experimental result shows that the device with elliptical electrodes can obtain lower resonance impedance and a higher Q factor,which results in a better loading capability. Even though the sensitivities of devices with elliptical and circular electrodes are found to be similar,the sensor with elliptical electrodes has much higher resolution due to a better frequency stability. The study indicates that the performance of QCRs with elliptical electrodes is superior to that of traditional QCRs with circular electrodes. Quartz crystal resonators (QCRs) with circular electrodes have been widely used for various liquid and gas sensing applications. In this work, quartz crystal resonators with elliptical electrodes were studied and tested for liquid property measurement. of the electrodes and a 5-MHz QCR with minimum series resistance and without any spurious modes was obtained. A series of AT-cut QCRs with elliptical electrodes of different sizes were fabricated and their sensing activities were compared to devices with circular electrodes. result shows that the device with elliptical electrodes can obtain lower resonance impedance and a higher Q factor, which results in a better Q factor, which results in a better loading factor much higher resolution due to a better frequency stability. The study indicates that the performance of QCRs with elliptical electrodes is superior to that of traditional QCRs with circular electrodes.
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