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扩散硅压力传感器是利用半导体单晶硅的压阻原理制成的压力传感器,具有精度高、尺寸小,长期稳定性好等优点,广泛用于流体压力、液位和流量的测量。本文较通俗的介绍了这类传感器的工作原理、国内外发展、技术性能和有关应用方面的知识.可帮助非本专业的同志了解并较好的选用这类传感器。
Diffusion silicon pressure sensor is the pressure sensor made of the piezoresistive principle of semiconductor single crystal silicon. It has the advantages of high precision, small size and long-term stability. It is widely used in the measurement of fluid pressure, liquid level and flow rate. This article introduces the working principle of this kind of sensor more generally, the domestic and international development, the technical performance and the related application knowledge.It can help the non-professional comrades understand and better choose this kind of sensor.