尽管常规地震检波器发展已有50年的历史,体积变得很小,灵敏度很高,并且较好地抑制地面噪声,但MEMS加速度传感器仍然以其直接的数字输出、高的矢量保真度和良好的低频响应,逐渐成为新世纪地球物理勘探技术发展中的重要角色。文章对MEMS传感器进行了概述,对其结构与工作原理进行了简要分析。 Although conventional geophones have been in development for 50 years, the volume has become very small, the sensitivity is high, and the ground noise is well suppressed. However, the MEMS accelerometer still uses its direct digital output, high vector fidelity and Good low-frequency response has gradually become an important role in the development of geophysical exploration technology in the new century. The article gives an overview of the MEMS sensor, and briefly analyzes its structure and working principle.