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本文提出了一种自动设计思想,即在多层膜设计过程中考虑监控误差对多层膜光学特性的影响。在自动设计的评价函数中不仅包含了膜系的光学特性,而且还包含了计算机模拟的制备成品率,并以最高的生产成品率作为最终的优化目标。用这种方法设计出的膜系不仅满足光学特性要求,而且具有较大的制造允差,便于最经济地组织生产。以宽带减反射膜,可见光加1.06μm的双波段减反射膜为例进行了自动设计,设计结果是令人满意的。
In this paper, an automatic design idea is proposed, which considers the influence of monitoring error on the optical characteristics of multilayer films in the design process of multilayer films. In the automatically designed evaluation function, not only the optical properties of the film system but also the computer simulation of the production yield, and the highest production yield as the final optimization goal. Membranes designed in this way not only meet the optical characteristics of the requirements, but also with greater manufacturing tolerances, to facilitate the most economical organization of production. The broadband antireflection film, visible light plus 1.06μm dual-band anti-reflection film was taken as an example to design automatically. The design result is satisfactory.