Canham在1990年报道了多孔硅光致发光,并提出发光多孔硅具有尺度为几个纳米的量子线阵结构。其后不久,Richter等制作了第一个多孔硅光发射器件。目前,有关多孔硅发光的机理研究,提出了几种设想。多数研究者倾向于多孔硅的量子线阵结构使带隙增宽,导致可见荧光。但是,到目前为止,发光多孔硅的量子线阵结构尚无直接的实验证据。另外一些观点有:多孔硅中的硅氢烷发光;附着在硅表面的某种分子发光,以及多孔硅表面性质 Canham reported porous silicon photoluminescence in 1990 and proposed that luminescent porous silicon has a quantum linear array with dimensions of a few nanometers. Shortly thereafter, Richter et al. Fabricated the first porous silicon light-emitting device. At present, several researches on mechanism of luminescence of porous silicon are proposed. Most researchers prefer the quantum wire structure of porous silicon to widen the bandgap, resulting in visible fluorescence. However, so far, there is no direct experimental evidence for the structure of quantum linear arrays of luminescent porous silicon. Other points of view are: hydrosilyl luminescence in porous silicon; luminescence of some molecules attached to the surface of silicon, and surface properties of porous silicon