半导体产业发展的初期(20世纪60年代),人们发现微米级别的元器件不但体积小,而且表现出比宏观尺寸器件更优良的电学和机械性能。这种新奇的现象引起了当时业界的兴趣,随后微米技术及其理念很快进入了半导体以外领域,与机械等传统学科相结合,产生了新的研究方向即微机电系统(MEMS)。在其发展初期,大批量的MEMS器件被应用在汽车行业,在安全气囊传感控制中迅速取得了成功。而后MEMS传感器 Early in the development of the semiconductor industry (in the 1960s), it was found that micrometer-scale components are not only small in size but also show better electrical and mechanical properties than macro-sized devices. This novel phenomenon aroused the industry’s interest at that time. Subsequently, the micro-technology and its concept soon entered the field outside the semiconductor, combining with the traditional disciplines such as machinery, resulting in a new research field called MEMS. In its early stages of development, high-volume MEMS devices were used in the automotive industry and gained immediate success in airbag sensing control. Then the MEMS sensor