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为了适应多种元素离子注入的需要,研制了一种多元素离子源。离子源的工作温度范围较宽,最高可以达到14O0℃,能够产生多种元素的离子,将蒸发炉和放电室结合在一起,使结构比较简单。现已产生了汞、铋、金三种重元素的离子,束流一般可达200μA,能量分散度在20～50ev范围内。当束流在50μA时,束的归一化亮度可达10~(11)A·m~(-2)·rad~(-2),在最佳情况下可达10~(12)A·?~(-2)·rad~(-2)。质谱分析表明,汞、铋、金三种离子含量都在90%以上。最高引出电压为30KV。
In order to meet the needs of a variety of elemental ion implantation, a multi-element ion source has been developed. Ion source operating temperature range is wide, up to 14O0 ℃, can produce a variety of elements of ions, the evaporation furnace and discharge chamber together, the structure is relatively simple. Has now produced mercury, bismuth, gold ions of three heavy elements, the beam generally up to 200μA, energy dispersion in the range of 20 ~ 50ev. When the beam current is 50μA, the normalized brightness of the beam can reach 10 ~ (11) A · m ~ (-2) · rad ~ (-2) and in the best case it can reach 10 ~ (12) A · ? ~ (-2) · rad ~ (-2). Mass spectrometry analysis showed that mercury, bismuth, gold three ion content is above 90%. The maximum voltage is 30KV.