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A novel and facile oxidation-induced self-doping process of graphene-silicon Schottky junction by nitric acid (HNO3) vapor is reported.The HNO3 oxidation process makes graphene p-type self-doped,and leads to a higher built-in potential and conductivity to enhance charge transfer and to suppress charge carrier recombination at the graphene-silicon Schottky junction.After the HNO3 oxidation process,the open-circuit voltage is increased from the initial value of 0.36 V to the maximum value of 0.47 V,the short-circuit current is greatly increased from 0.80μA to 7.71 μA,and the ideality factor is optimized from 4.4 to 1.0.The enhancement of the performance of graphene-Si solar cells may be due to oxidation-induced p-type self-doping of graphene-Si.junctions.