基于激光热裂纹控制法,提出了多焦点激光分离厚透明材料的方法。通过理论计算与ZEMAX软件模拟相结合的方式,设计了能形成三个焦点的光路系统,并利用该系统进行了夹层玻璃、磷酸二氢钾(KDP)晶体、超白玻璃等透明材料的切割分离实验。结果表明,利用该方法得到的表面平整光滑,无亚表面损伤,粗糙度小,有效解决了单个激光焦点热裂纹分离方法受材料厚度限制的问题,该方法具有很大的应用前景。 Based on the laser thermal crack control method, a multi-focal laser separation thick transparent material method is proposed. Through the combination of theoretical calculation and ZEMAX software simulation, an optical system that can form three focal points is designed and used to cut and separate transparent materials such as laminated glass, potassium dihydrogen phosphate (KDP) crystal and ultra-white glass experiment. The results show that the surface smooth and smooth, no subsurface damage and small roughness are obtained by this method. This method solves the problem that the single laser focus thermal crack separation method is limited by material thickness. This method has great application prospect.