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  5. Fabrication of two-dimensional periodic TiO2 pillar arrays by multi-beam laser interference lithogra

Fabrication of two-dimensional periodic TiO2 pillar arrays by multi-beam laser interference lithogra

来源 :自然科学期刊(英文) | 被引量 : 0次 | 上传用户：ayun33
【摘 要】
：
Two-dimensional (2D) periodic TiO2 pillar arrays, applicable to photonic crystals and micro-channels, were fabricated by direct patterning of a TiO2-organic hyb
【作 者】
：
Hiroyo Segawa Hiroaki Misawa 
【机 构】
：
不详
【出 处】
：
自然科学期刊(英文)
【发表日期】
：
2009年3期
【关键词】
：
LITHOGRAPHY CAPILLARY Force Assembly Lithography Capillary Force Assembly 
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论文部分内容阅读
Two-dimensional (2D) periodic TiO2 pillar arrays, applicable to photonic crystals and micro-channels, were fabricated by direct patterning of a TiO2-organic hybrid material by multi-beam laser interference lithography and calcination of hybrid patterns. 2
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