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从溶胶制备、涂覆和热处理三个步骤介绍了溶胶-凝胶技术制备氧化物薄膜基本原理和工艺过程;对有关三个步骤的研究成果进行了综述。
The basic principle and process of oxide film prepared by sol-gel technology are introduced from the three steps of sol preparation, coating and heat treatment. The research results of the three steps are reviewed.