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为了提高航空产品质量和可靠性,对陀螺敏感元件(三极电门)进行气密性检漏试验探讨。 三极电门壳体内充以导电液体,所以气密性是三极电门至关重要的指标,是确保三极电门安全可靠工作的基础。 由于氦质谱检漏方法存在着双值性,无法确定漏率的大小,必须采用一种补救的办法才能解决双值性问题,带着实际问题请教了骊山微电子公司,结合我们所掌握的资料和试验数值最后确定了采用氦质谱-氟碳油气泡法检漏,经大量试验给定了检漏指标。
In order to improve the quality and reliability of aviation products, air tightness testing of gyro-sensitive components (triode gates) is discussed. Three-pole electric door shell filled with conductive liquid, so air tightness is a tripolar gate is an important indicator, is to ensure the safety and reliability of the three-pole electric gate work. Due to the existence of dual-value helium mass spectrometry leak detection method, can not determine the size of the leak rate, you must use a remedy to solve the problem of duality, with the actual problems consulted Lishan Microelectronics, combined with our grasp Data and experimental values finally confirmed by helium mass spectrometry - Fluorocarbon oil gas leak detection, given a large number of tests leak detection index.