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采用溶剂蒸发对流自组装法将单分散二氧化硅(SiO_2)微球组装形成三维有序胶体晶体模板。以锗烷(GeH_4)为先驱体气,用等离子增强化学气相沉积法向胶体晶体的空隙中填充高折射率材料Ge。酸洗去除二氧化硅微球,得到Ge反蛋白石三维光子晶体。通过扫描电镜、X射线衍射仪和傅里叶变换显微红外光谱仪对锗反蛋白石的形貌、成分和光学性能进行了表征。结果表明:Ge在SiO_2微球空隙内填充致密均匀,得到的锗为多晶态,锗反蛋白石为三维有序多孔结构。锗反蛋白石的测试光谱图有明显的光学反射峰,表现出光子带隙效应。测试的完全光子带隙位于中红外3.4μm处,测试的光学性能与理论计算基本吻合。
The monodisperse silica (SiO 2) microspheres were assembled by solvothermal convection self-assembly to form a three-dimensional ordered colloidal crystal template. Ge (GeH_4) is used as a precursor gas, and the gap of colloidal crystals is filled with high refractive index material Ge by a plasma enhanced chemical vapor deposition method. Pickling removes the silica microspheres to obtain a Ge inverse opal three-dimensional photonic crystal. The morphology, composition and optical properties of Ge-inverse opal were characterized by scanning electron microscopy, X-ray diffraction and Fourier transform infrared spectroscopy. The results show that Ge is densely packed in the interstices of SiO 2 microspheres, and the obtained germanium is polycrystalline. The germanium inverse opal is a three-dimensional ordered porous structure. Germanium anti-opal test spectrogram obvious optical reflection peak, showing the photonic band gap effect. The complete photonic bandgap of the test is located at 3.4 μm in the mid-infrared, and the optical performance of the test is in good agreement with the theoretical calculation.