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本文报告亚微米光刻５倍ｇ线与ｉ线投影光刻物镜的光学制造技术。讨论超高精度要求的球面曲率半径、透镜中心厚度、球面面形与透镜偏心差等各项指标的综合控制技术与检测方法。着重介绍了作者所发展的大口径高精度双胶合透镜的计算机辅助无变形胶合技术。给出了加工检测结果以及镜头的主要性能指标。
This paper reports the optical fabrication of submicron lithography 5x g line and i line projection lithography objective. Discusses the comprehensive control techniques and testing methods of various indexes such as spherical radius of curvature, lens center thickness, spherical surface and lens eccentricity required by ultra-high precision. This paper mainly introduces the computer-aided non-deforming gluing technology of the large-caliber high-precision double-glued lens developed by the author. Given the processing test results and the main performance of the lens.