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为了进行Ｓｉ聚焦离子束微细加工技术的研究，研制了ＡｕＳｉ液态金属离子源制备设备及其分析设备，制成了实用化的ＡｕＳｉ合金源，得到了制备该合金源的成熟工艺，利用Ｅ×Ｂ质量分离器分离出Ａｕ和Ｓｉ离子束，对源的一些特性如电流—电压曲线、加热功率—发射电流曲线、束流质谱及源的寿命作了分析。该源结构采取同轴针型，合金槽的材料为钼，发射尖为钨丝。源正常工作时的加热方式为间接加热式。该源与带质量分离器的聚焦离子束系统结合，将迈开亚微米Ｓｉ离子束加工的第一步。并为今后研究其它合金源提供经验。
In order to study the micro-fabrication technology of Si focused ion beam, AuSi liquid metal ion source preparation equipment and its analytical equipment were developed, and a practical AuSi alloy source was made. The mature technology for preparing this alloy source was obtained. The E × B The mass separator separates the Au and Si ion beams and analyzes some of the source properties such as current-voltage curve, heating power-emission current curve, beam mass spectrum and source lifetime. The source structure to take the coaxial needle type, the alloy groove material is molybdenum, the emission tip is tungsten wire. The source of normal work when the heating method is indirect heating. Combined with a focused ion beam system with a mass separator, this source will lead the first step in sub-micron Si ion beam processing. And provide experience for the future research of other alloy sources.