利用中心波长为775 nm、重复频率为1 kHz、脉宽为130 fs的飞秒激光脉冲对厚度为200μm的铜片进行微加工,制作了适用于太赫兹(THz)波段(0.1~4 THz)的二维金属亚波长孔阵列。实验中,分别固定激光能量和加工时间,研究烧蚀孔直径随激光功率及加工时间的变化规律,发现激光偏振态是引起烧蚀缺口的主要原因。利用数值模拟软件(CST)计算出适用于THz波段的金属孔阵列结构参数,根据以上实验结果选择合适的激光参数制作了孔阵列。 The THz band (0.1 ~ 4 THz) was fabricated by micromachining a copper plate with a thickness of 200 μm using a femtosecond laser pulse with a center wavelength of 775 nm, a repetition frequency of 1 kHz and a pulse width of 130 fs. Two-dimensional metal subwavelength array of holes. In the experiment, the laser energy and processing time were respectively fixed, and the variation rule of the diameter of the ablated hole with the laser power and processing time was studied. It was found that the laser polarization state was the main reason causing the ablation gap. The structure parameters of metal hole arrays for THz band were calculated by numerical simulation software (CST), and the hole array was made by selecting appropriate laser parameters according to the above experimental results.