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在鳍型场效应晶体管(SOI FinFET)相关静电防护技术研究基础上,提出了一种新型的体区接触固定型绝缘体上硅鳍型场效应晶体管泄放钳位装置(Fix-base SOI FinFET Clamp)。该新型结构的器件解决了基区接触浮空在静电防护设计时引起的一系列问题,而且对正常的FinFET工艺具有良好的兼容性。通过计算机辅助工艺设计(TCAD)仿真论证了Fix-base SOI FinFET Clamp具有明显效果,详细阐述和讨论了SOI FinFET和Fix-base SOI FinFET Clamp工作状态下的电流和热分布。
Based on the research of related static protection technology of SOI FinFET, a new type of Fix-base SOI FinFET Clamp is proposed. . The new structure of the device solves the base contact floating in the electrostatic protection design caused a series of problems, but also for the normal FinFET process has good compatibility. The fixture-based SOI FinFET Clamp has been demonstrated to demonstrate the effectiveness of the Clamp through Claimed Computer Aided Process Design (TCAD) simulations. The current and heat distribution of the Clamp under the operating conditions of SOI FinFET and Fix-base SOI FinFET are described and discussed in detail.