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结合MEMS工艺研制了一种可用于红外气体传感器的低成本电调制MEMS辐射光源。辐射源主要由Si_3N_4/SiO_2的复合支撑薄膜和铂金发热电极组成。在2~15μm的红外辐射波段,有足够强的辐射强度,可产生相当于黑体300~850K的红外辐射,其辐射效率达到10.9%;辐射源的动态调制频率可达到100Hz,响应时间12.8ms,足以满足红外气体测量对所需红外光源性能的要求。通过将微辐射源用于实际的NDIR气体传感器中,证明辐射源具有稳定的辐射功率,可以完成20ppm CO_2和50ppm SO_2的探测,并具有8s左右的响应时间。
A low cost electrosurgical MEMS radiation source that can be used for infrared gas sensors was developed by combining MEMS technology. The radiation source is mainly composed of a composite supporting film of Si_3N_4 / SiO_2 and a platinum heating electrode. In the infrared radiation band of 2 ~ 15μm, strong enough radiation intensity can produce infrared radiation equivalent to blackbody of 300 ~ 850K, the radiation efficiency reaches 10.9%; the dynamic modulation frequency of the radiation source can reach 100Hz, the response time is 12.8ms, Enough to meet the infrared gas measurement requirements of the performance of the required infrared light source. By using a micro-radiation source in an actual NDIR gas sensor, it is proven that the radiation source has a stable radiant power, capable of detecting 20 ppm CO 2 and 50 ppm SO 2, and has a response time of about 8 seconds.