设计并制作了一种亚波长透射光栅,利用该光栅实现了半导体激光阵列光谱合束。基于严格耦合波理论,对光栅占空比、脊高和周期等进行了设计,模拟了不同结构参数对光栅衍射效率的影响,从而实现了光栅衍射效率的优化。理论计算表明,优化后的光栅对940nm激光的-1级衍射效率可达92%。实验结果表明,激光阵列光谱合束后,输出功率为46.2 W,光束质量为3.9mm·mrad。 A subwavelength transmission grating was designed and fabricated. The grating was used to realize the semiconductor laser array spectral combination. Based on the strictly coupled wave theory, the duty cycle, ridge height and period of the grating are designed, and the influence of different structural parameters on the grating diffraction efficiency is simulated, so that the diffraction efficiency of the grating is optimized. The theoretical calculations show that the optimized grating can achieve the order-1 diffraction efficiency of 92% for 940nm laser. The experimental results show that the output power of the laser array is 46.2 W and the beam quality is 3.9 mm · mrad after the optical spectrum is combined.