介绍了一种能自动测量超光滑光学表面积分散射率的积分散射仪。它既能测量光学膜片,同时也能测量光学基片的积分散射。核心部件是一个光学积分球,其作用是收集散射光。对积分散射理论以及仪器原理、关键技术和系统性能等进行了阐述。相对测量精度为±11%,灵敏度为2.3×10-6。 An integrating scatterometer capable of automatically measuring the superficial optical surface area scattering rate is introduced. It measures both the optical film and the integral scattering of the optical substrate. The core component is an optical integrating sphere whose role is to collect the scattered light. The theory of integral scattering, the principle of instrument, the key technology and the system performance are described. Relative measurement accuracy of ± 11%, the sensitivity of 2.3 × 10-6.