为获得性能优良的三基色窄带滤光片,提出了一种基于减反射薄膜波导光栅结构的导模共振滤光片。该滤光片由亚波长光栅结构、波导层和基底组成。采用严格耦合波理论分析了亚波长光栅结构和波导层厚度对导模共振滤光片反射光谱性能的影响。数值分析表明λ/4-λ/2-λ/4结构能有效提高导模共振滤光片的性能。当光栅结构位于基底侧时,红绿蓝三基色滤光片旁通带截止带宽分别为447,349和279nm,反射率均优于95%,反射带均小于0.2nm。设计的三基色滤光片具有良好的窄带反射特性,在彩色合成与调制中有应用前景。 In order to obtain a good three-primary-color narrow-band filter, a guided-mode resonant filter based on anti-reflection thin film waveguide grating was proposed. The filter consists of a subwavelength grating structure, a waveguide layer and a substrate. The influence of subwavelength grating structure and waveguide layer thickness on the performance of the guided-mode resonant filter was analyzed using the rigorous coupled-wave theory. Numerical analysis shows that the λ / 4-λ / 2-λ / 4 structure can effectively improve the performance of the guided-mode resonant filter. When the grating structure is located on the substrate side, the cut-off bandwidths of the passbands of RGB filters are 447, 349 and 279 nm, respectively. The reflectivity is better than 95% and the reflection bands are less than 0.2 nm. The design of the three primary color filters with good narrow-band reflection characteristics, color synthesis and modulation in the application prospects.