激光工艺参数对玻璃陶瓷孔锥度和热影响区的影响

来源 :激光与光电子学进展 | 被引量 : 0次 | 上传用户:gpi678c
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通过析因设计实验,研究了工艺参数对氟金云母玻璃陶瓷激光加工孔锥度和热影响区(HAZ)的影响,建立了孔锥度和HAZ厚度与工艺参数之间的回归方程,并对工艺参数进行了优化。实验结果表明,激光加工工艺参数对孔锥度和HAZ的影响程度按强弱依次为电流、离焦量、脉宽和重复次数。此外,孔锥度和HAZ还受电流和离焦量、电流和脉宽之间交互作用的影响。建立的回归方程能够较好地描述孔锥度和HAZ厚度与工艺参数之间的关系,由此获得了最优的激光加工工艺参数:电流150A,脉宽2ms,重复次数3次,离焦量2.18mm。 Through factorial design experiments, the influence of process parameters on the hole taper and heat affected zone (HAZ) of fluorophlogopite glass-ceramic laser was studied. The regression equations between the hole taper and the HAZ thickness and the process parameters were established, and the process parameters Optimized. The experimental results show that the influence degree of laser processing parameters on taper and HAZ is current, defocus amount, pulse width and repetition times in turn. In addition, hole taper and HAZ are also affected by the interaction between current and defocus amount, current and pulse width. The established regression equation can well describe the relationship between the hole taper and the HAZ thickness and the process parameters, thus obtaining the optimal laser processing process parameters: current 150A, pulse width 2ms, repeat times 3 times, the amount of defocus 2.18 mm.
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