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用P矩阵方法分析带变迹叉指换能器(IDT)和倾斜金属反射栅的高Q值Y型声表面波(SAW)质量沉积传感器的通带纹波,并分别在振荡和非振荡模式下比较了这些传感器的通带纹波和Q值。分析了获得高Q值的原因。理论和实验结果表明:均匀孔径无反射栅的传感器旁瓣抑制为10dB,振荡模式下其Q值为5289;通过孔径变迹设计,传感器的旁瓣抑制和Q值分别改善到25dB和8689;而对孔径变迹并加入倾斜反射栅的传感器,这两个参数提高到25dB和12477。非振荡模式下带反射栅的传感器比没有反射栅器件的通带纹波约低2dB。因此,变迹IDT和金属反射栅的应用是SAW质量传感器Q值的改善的两个重要因素。由于Q值改善,质量沉积灵敏度达到5.24GHz.cm2/g
The passband ripple of a high-Q SAW mass deposition sensor with apodized interdigital transducer (IDT) and a tilted metallic reflector was analyzed by the P matrix method and analyzed in oscillatory and non-oscillatory modes The passband ripple and Q values for these sensors are compared. Analysis of the reasons for the high Q value. The theoretical and experimental results show that the sidelobe suppression of the sensor with uniform aperture without reflection grating is 10dB and the Q value is 5289 in oscillation mode. Sidelobe suppression and Q value of the sensor are improved to 25dB and 8689 respectively by aperture apodization design; Sensors that bore apodization and added tilt-reflective grids increased these two parameters to 25dB and 12477. The sensor with a reflective grid in non-oscillatory mode is approximately 2 dB lower than the pass-band ripple without a reflective gate device. Therefore, the use of apodized IDTs and metal reflectors are two important factors for the improvement of the Q value of the SAW mass sensor. As the Q value is improved, the mass deposition sensitivity reaches 5.24 GHz.cm2 / g