中间电极可控的三电极放电激光器预脉冲技术［１，２］的出现使放电激光器得到了实质上的进展，这一技术开拓了在效率为３～５％下提高准分子激光器的平均功率至几千瓦的前途。在上述方法中泵浦采用两个放电电路，用以激励和维持放电。在第一个高压低能冲击波电路中，电子... The advent of an intermediate electrode-controllable three-electrode discharge laser pre-pulse technique [1, 2] has led to substantial progress in discharge lasers, a technique that has been developed to increase the average power of an excimer laser at an efficiency of 3 to 5% A few kilowatts of the future. In the above method, the pump uses two discharge circuits to excite and sustain the discharge. In the first high-voltage low-energy shock wave circuit, electronic ...