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采用等离子体电沉积法在水–乙醇电解液中制备了类金刚石(DLC)薄膜,工艺条件为:乙醇和水的体积比4∶1,KCl 3 g/L,电流密度500~800 mA/cm2,电压1 500 V,时间4 h。研究了电流密度和电极间距对DLC薄膜的显微硬度、厚度和表面形貌的影响。结果表明,电流密度和电极间距都对电极表面气泡区域厚度、均匀程度、稳定性及电极表面电荷密度有较大影响,适宜的电流密度和电极间距分别为600~700 mA/cm2和6~10 mm。采用较佳工艺制得的DLC膜表面平整均匀,为多晶结构,摩擦因数约为0.13。
Diamond-like carbon (DLC) films were prepared by plasma electrodeposition in a water-ethanol electrolyte. The process conditions were as follows: volume ratio of ethanol to water 4: 1, KCl 3 g / L, current density 500-800 mA / cm2 , Voltage 1 500 V, time 4 h. The effects of current density and electrode spacing on the microhardness, thickness and surface morphology of DLC films were investigated. The results show that both the current density and electrode spacing have great influence on the thickness, uniformity and stability of bubble area on the electrode surface and the surface charge density of the electrode. The suitable current density and electrode spacing are 600-700 mA / cm2 and 6-10 mm. The surface of the DLC film prepared by the better technology is even and uniform and has a polycrystalline structure with a friction coefficient of about 0.13.