论文部分内容阅读
用实验的方法研究了微硅梁在光激励下产生谐振的机理 ,解释了微硅梁在光激励下的谐振是由于光 热 机能量转化的结果
The mechanism of the resonance of the micro-silicon beam under photoexcitation is studied experimentally, and the resonance of the micro-silicon beam under the photoexcitation is explained as a result of the energy conversion of the solar thermal engine